Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge
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منابع مشابه
Plasma inhomogeneities near the electrodes of a capacitively- coupled radio-frequency discharge containing dust particles
Small plasma spheroids are evidenced and analyzed in front of the electrodes of a capacitivelycoupled radio-frequency discharge in which dust particles are growing. These regions are characterized by a spherical shape, a slightly enhanced luminosity and are related to instabilities induced by the presence of dust particles. Several types of behaviors are identified and particularly their chaoti...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2019
ISSN: 1361-6595
DOI: 10.1088/1361-6595/ab53a0